Higher-K titanium dioxide incorporating LaAlO3 as dielectrics for MIM capacitors

In this work, we studied a TiO2 mixed LaAlO3 dielectric (TLAO) for metal–insulator–metal (MIM) capacitors. The resulting capacitor characteristics showed a high capacitance density of 23.2 fF/μm2 and a low leakage current of 7.5  10-7 A/cm2 at 1 V. Comparing to the control samples of TiLaO (TLO), TLAO dielectrics with Al2O3 doping showed lower leakage current, smaller voltage nonline…