Structure and dielectric properties of barium titanate thin films for capacit…

Abstract. BaTiO3 is a typical ferroelectric material with high relative permittivity and has been used for various applications, such as multilayer ceramic capacitors (MLCCs). With the tendency of miniaturization of MLCCs, the thin films of BaTiO3 have been required. In this work, BaTiO3 thin films have been deposited on Pt-coated Si substrates by RF magnetron sputtering under different deposi…