Accurate High Temperature Measurements Using Local Polysilicon Heater Structures

Conventionally, measurements of temperaturedependent device parameters and degradation are performed using thermo chucks or dedicated test-furnaces. With such an equipment, the available temperature range is limited (typically to a maximum of 300 ◦C) and reliable temperature switches are rather slow, i.e., in the range of minutes to hours. We refine the recently suggested use of polycrystall…