Ditapis dengan
Wafer Map Defect Detection and Recognition Using Joint Local and Nonlocal Lin…
Abstract—In semiconductor manufacturing processes, defect detection and recognition in wafer maps have received increasing attention from semiconductor industry. The various defect patterns in wafer maps provide crucial information for assisting engineers in recognizing the root causes of the fabrication problems and solving them eventually. This paper develops a manifold learning-based wafer…
- Edisi
- VOL. 29, NO. 1, FEBRUARY 2016
- ISBN/ISSN
- 0894-6507
- Deskripsi Fisik
- IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, VOL. 29, NO. 1, FEBRUARY 2016
- Judul Seri
- IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, VOL. 29, NO. 1, FEBRUARY 2016
- No. Panggil
- -
Semiconductor Manufacturing Process Monitoring Using Gaussian Mixture Model a…
Abstract—Fault detection has been recognized in the semiconductor industry as an effective component of advanced process control framework in increasing yield and product quality. Principal component analysis (PCA) has been applied widely to semiconductor manufacturing process monitoring. However, the unique characteristics of semiconductor processes—high dimension of data, nonlinearity in…
- Edisi
- VOL. 25, NO. 3, AUGUST 2012
- ISBN/ISSN
- 0894-6507
- Deskripsi Fisik
- IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, VOL. 25, NO. 3, AUGUST 2012
- Judul Seri
- IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, VOL. 25, NO. 3, AUGUST 2012
- No. Panggil
- -
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