Abstract Ruthenium chloride and iridium chloride precursors (denoted hereafter as RuCl3aH2O and IrCl3bH2O) reacted with water molecules and transformed into the chloro-oxy-hydroxyl-metal (denoted as Ru(OH)dCl3dcH2O and Ir(OH)oCl3odH2O) structures when they were dissolved in water. The storage time, preheating, and initial pH of the deposition baths were demonstrated to significantly infl…