High-Q UHF Spoke-Supported Ring Resonators

Abstract—A vibrating micromechanical spoke-supported ring resonator employing a central peg-anchor, balanced non-intrusive quarter-wavelength extensional support beams, and notched support attachments attains high Q-factor in vacuum, posting 10 000 at 441 MHz when made of polysilicon structural material and 42 900 at 2.97 GHz when made of microcrystalline diamond. The latter marks the highes…