Phase Transformation of Monocrystalline Silicon Induced by Polishing With Dia…

Abstract—A newly developed semi-fixed flexible polishing tool called sol-gel (SG) polishing pads can satisfy the polishing demand of silicon wafers with scratch-free and nanoroughness surface. However, an obvious damage layer emerges on the surface of monocrystalline silicon wafer after polished by SG polishing pads with diamond abrasives. In this paper, combined characterizations consist of …