Synthesis, characterization, and electronic structure of few-layer MoSe2 gran…

Few-layer MoSe2 granular films were prepared using rapid thermal processing (RTP) of stacked elemental layers (SELs) deposited using electron beam evaporation in the sequence of Mo/Se/Mo. RTP was carried out at various temperatures ranging from 550 to 750 8C, and durations ranging from 90 to 150 s. Morphology and microstructure of granular thin films were characterized by atomic force microsc…