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Nanoscale Structure and Morphology of Atomic Layer Deposition Platinum on SrTiO3 (001)

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The early stages of nucleation and growth of atomic layer deposition (ALD) platinum on SrTiO3 (001)
have been studied. Scanning electron microscopy reveals the ALD Pt deposits as discrete nanoparticles
that grow and coalesce with increasing number of ALD cycles, ultimately resulting in a continuous film
after ∼40 cycles. Atomic force microscopy shows the films to be fine-grained and highly conformal
such that the 0.4 nm atomic steps of the underlying SrTiO3 (001) surface remain visible even after 80 Pt
ALD cycles. Grazing-incidence small-angle X-ray scattering (GISAXS) studies demonstrate that the early
stages of Pt ALD yields nanoparticles that are well approximated as cylinders with a height to radius
ratio that is nearly unity. Consistent with nanoparticle coalescence, GISAXS also reveals an interparticle
spacing that increases with the number of ALD cycles. X-ray fluorescence measurements of the Pt coverage
reveal growth dynamics in which the Pt deposition is initially faster than the steady-state growth rate
that emerges after 40-70 ALD cycles. These experimental results are understood through the application
of a model that suggests that the SrTiO3 surface is more reactive than the Pt species and that Pt diffusion
is operative in nanoparticle formation. Overall, this study delineates ALD growth conditions for forming
either Pt nanoparticles or continuous Pt thin films on SrTiO3 (001), thus presenting potentially useful
substrates for catalysis and microelectronics, respectively.

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Ketersediaan

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Informasi Detail

Judul Seri

Chemistry of Materials

No. Panggil

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Penerbit

Washington, DC : American Chemical Society., 2009

Deskripsi Fisik

Chem. Mater. 2009, 21, 516–521

Bahasa

English

ISBN/ISSN

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Klasifikasi

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Tipe Isi

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Tipe Media

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Tipe Pembawa

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Edisi

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Subjek

KIMIA

Info Detail Spesifik

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Pernyataan Tanggungjawab

agus

Versi lain/terkait

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