e-journal

Effects of N2 content and thickness on CrNx coatings on Mg alloy by the planar DC reactive magnetron sputtering

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Abstract.
The CrNx (0 < x = N/Cr < 1) coatings on Mg alloy were prepared by DC reactive planar magnetron
sputtering at a mixed atmosphere containing Ar and N2. The effects of N2 content and thickness on the
CrNx coatings were characterized by the X-ray photoelectron spectrometry (XPS), X-ray diffraction (XRD)
and field emission scanning electron microscope (FESEM). The experimental results show that the N
atomic concentration increases exponentially and N1s spectrum shifts downward with the increase in
N2 content (Q(N2)), and the deposition rate decreases exponentially. Themorphologies evolution of CrNx
coatings shows that the growth structure changes from fibre growth to columnar growth with the
increase in w(N2). Based on evolution of phase and structure, a SZM model is summarized, indicating that
the change of structure and phase is consistent; ZT and sub-ZT correspond to Cr2N + Cr and CrN + Cr2N,
respectively. The in-plane mean grain size linearly increases and the Root Mean Square roughnessWRMS
increases exponentially with coating thickening, and grain size obeys Gaussian distribution.

Keywords: CrNx coatings, Planar DC reactive magnetron sputtering, Structure evolution, N2 content, Grain growth, Grain size distribution

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Informasi Detail

Judul Seri

Applied Surface Science

No. Panggil

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Penerbit

London : Elsevier B.V.., 2009

Deskripsi Fisik

Applied Surface Science 255 (2009) 6515–6524

Bahasa

English

ISBN/ISSN

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Klasifikasi

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Tipe Isi

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Tipe Media

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Tipe Pembawa

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Edisi

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Subjek

KIMIA

Info Detail Spesifik

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Pernyataan Tanggungjawab

agus

Versi lain/terkait

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