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Effects of substrate rotation on the microstructure of metal sheet fabricated by electron beam physical vapor deposition

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Abstract.
The effects of substrate rotation speed and rotation mode on the microstructure of large-sized metal
sheet fabricated by electron beam physical vapor deposition technique were investigated. Helical and
columnar microstructures were found in the deposited sheet. Both types of microstructures exhibit no
preferential crystallographic orientation. The column inclination under asymmetric vapor incidence
pattern was discussed. Integrated vapor incidence angle was found to be effective in evaluating the
column inclination.

Keywords: Physical vapor deposition (PVD), Helical microstructure, Film growth

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Informasi Detail

Judul Seri

Applied Surface Science

No. Panggil

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Penerbit

London : Elsevier B.V.., 2009

Deskripsi Fisik

Applied Surface Science 255 (2009) 5831–5836

Bahasa

English

ISBN/ISSN

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Klasifikasi

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Tipe Isi

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Tipe Media

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Tipe Pembawa

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Edisi

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Subjek

KIMIA

Info Detail Spesifik

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Pernyataan Tanggungjawab

agus

Versi lain/terkait

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