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Hydrogen desorption from a diamond-like carbon film by hyperthermal atomic oxygen exposure

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Abstract.
The densities of hydrogen and carbon atoms in a hydrogenated diamond-like carbon (DLC) film exposed
to a hyperthermal atomic oxygen beam were investigated by Rutherford backscattering spectroscopy
(RBS) and elastic recoil detection analysis (ERDA). The hydrogen density in DLC decreased upon atomic
oxygen beam exposure with collision energy as low as 2 eV, whereas an exposure greater than 3 eV was
necessary to remove carbon atoms. A high-collision energy also led to hydrogen desorption in the deeper
region of DLC. The surface density of hydrogen decreased 6% by atomic oxygen exposure, and was
independent of the collision energy. Additionally, the non-bonded hydrogen, which could diffuse in DLC,
was desorbed by the energy transfer from the atomic oxygen collisions.

Keywords: Atomic oxygen, Diamond-like carbon, Hydrogen, Rutherford backscattering spectroscopy, Elastic recoil detection analysis, Synchrotron radiation

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Informasi Detail

Judul Seri

Applied Surface Science

No. Panggil

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Penerbit

London : Elsevier B.V.., 2009

Deskripsi Fisik

Applied Surface Science 255 (2009) 6710–6714

Bahasa

English

ISBN/ISSN

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Klasifikasi

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Tipe Isi

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Tipe Media

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Tipe Pembawa

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Edisi

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Subjek

KIMIA

Info Detail Spesifik

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Pernyataan Tanggungjawab

agus

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