e-journal
Fabrication and characterization of positive and negative copper sulfide micropatterns on self-assembled monolayers
Abstract.
Positive and negative micropatterned copper sulfide thin films were successfully fabricated through
chemical bath deposition methods. The thin films were deposited on patterned Si substrates with two
different self-assembled monolayers (SAMs), i.e., NH2/CH3 and NH2/OH terminated silane, respectively.
Under an optimal depositing condition, the copper sulfide thin films were selectively deposited on –NH2
regions. The resultant Cu2S crystal films, in positive and negative circle patterns, respectively, were
verified by SEM, XPS, XRD spectra. UV–vis spectrum analysis demonstrated that the prepared Cu2S films
exhibited high optical transmission in the visible light regions (vis) and near-infrared region (NIR), and a
low band gap of 2.48 eV.
Keywords:
Copper sulfide
Self-assembly monolayer
Micropattern
Optical property
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