e-journal
Recovery of hazardous semiconductor-industry sludge as a useful resource
Abstract.
Sludge, a solid waste recovered from wastewater of semiconductor-industries composes of agglomerates
of nano-particles like SiO2 and CaF2. This sludge deflocculates in acidic and alkaline aqueous solutions
into nano-particles smaller than 100 nm. Thus, this sludge is potentially hazardous to water resources
when improperly dumped. It can cause considerable air-pollution when fed into rotary-kilns as a raw
material for cement production. In this study, dried and pulverized sludge was used to replace 5–20 wt.%
Portland cement in cement mortar. The compressive strength of the modified mortarwas higher than that
of plain cement mortar after curing for 3 days and more. In particular, the strength of mortar with 10 wt.%
substitution improved by 25–35% after curing for 7–90 days. TCLP studies reveal no detectable release
of heavy metals. Preliminary studies showed that nano-particles deflocculated from the sludge, when
cured for up to 3 days retain in the modified mortar their nano-size, which become large-sized hydration
compounds that contribute to the final mortar strength. Semiconductor sludge can thus be utilized as a
useful resource to replace portion of cement in cement mortar, thereby avoiding their potential hazard
on the environment.
Keywords:
Chemical mechanical polishing
Sludge
Nano-particles
Cement mortar
Resource
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