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Structural, optical and electrical properties of multilayer stacks ZnO:Al/Ag/ZnO:Al and ZrO2/Ag/ZrO2

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Structural, optical, and electrical properties of multilayer stacks ZnO:Al/Ag/ZnO:Al and ZrO2/Ag/ZrO2 are studied. The stacks are deposited on glass substrates without heating by consecutive r.f. magnetron sputtering of ZnO:Al and Ag or ZrO2 and Ag targets, respectively. The properties of samples as-deposited and annealed in forming gas atmosphere, at 180 8C for 1 h are compared. The structural properties of the stacks are studied by TEM and SEM images and demonstrate semicontinuous granular structure of the Ag films. The Ag nanograins in ZrO2-based stacks have a larger size than in the ZnO-based stacks. The spectra of transmittance and reflectance have bands resulting from interband transitions of d-shell electrons of Ag atoms and plasma resonance oscillations of free electrons. The sheet resistance of the as-deposited and annealed stacks is in the range 3.1–8.9V/&and change slightly after annealing. The deposited stacks have potential for application as a back reflector in thin-film solar cells for improvement of light harvesting and their efficiency.

Keywords magnetron sputtering, multilayers, optical properties, thin films, ZnO, ZrO2

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Informasi Detail

Judul Seri

Phys. Status Solidi

No. Panggil

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Penerbit

: WILEY-VCH Verlag GmbH & Co. KGaA., 2015

Deskripsi Fisik

Phys. Status Solidi A 212, No. 1, 189–193 (2015)

Bahasa

English

ISBN/ISSN

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Tipe Isi

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Tipe Media

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Tipe Pembawa

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Edisi

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Subjek

FISIKA

Info Detail Spesifik

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Pernyataan Tanggungjawab

Wati/Agus

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