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An Algorithm of Multi-Subpopulation Parameters With Hybrid Estimation of Distribution for Semiconductor Scheduling With Constrained Waiting Time

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Abstract
Scheduling for wafer fabrication of advanced technology nodes entails complicated constraints such as limited waiting times. Focusing on real settings, this paper aims to develop a novel genetic algorithm of multi-subpopulation parameters with hybrid estimation of distribution (MSPHEDA) to solve the present problem effectively and efficiently. To estimate the validity of this approach, ten scenarios were simulated on the basis of empirical data as the basis to compare the performance of MSPHEDA and other heuristic methods for minimizing makespan and reducing the total exceeded limited waiting time. The results have shown practical viability of the proposed approach.

Index Terms—Hybrid estimation of distribution, limited waiting time constraint, multi-subpopulation, semiconductor manufacturing scheduling.

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Informasi Detail

Judul Seri

IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, VOL. 28, NO. 3, AUGUST 2015

No. Panggil

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Penerbit

: IEEE., 2015

Deskripsi Fisik

IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, VOL. 28, NO. 3, AUGUST 2015

Bahasa

English

ISBN/ISSN

0894-6507

Klasifikasi

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Tipe Isi

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Tipe Media

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Tipe Pembawa

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Edisi

VOL. 28, NO. 3, AUGUST 2015

Subjek

SEMIKONDUKTOR

Info Detail Spesifik

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Pernyataan Tanggungjawab

ETY

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