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Analysis and Characterization of Capacitance Variation Using Capacitance Measurement Array

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Abstract
To address the need for direct extraction of the capacitance of a chip, a capacitance measurement array (CMA) has been developed. The operation of the CMA is based on the charge-based capacitance measurement (CBCM) technique. The CMA chip consists of 144 CBCM array units (CAU) and each CAU is designed to measure eight individual capacitors. Element selection and precise measurement are achieved using three-stage transmission gates with four address lines, to ensure a measurement accuracy for capacitor of 1 fF. Different components of the capacitance measurement are addressed and the parameters of
CAU are varied to determine the individual influence of these factors. Different physical capacitor shapes are examined to show the capacitance variation as a result of changes to the horizontal
and vertical dimensions. MOS transistors with different channel widths are used to illustrate the driving capability influence. The chip is fabricated by a 180 nm CMOS process with six metallic interconnect layers. Based on the results of capacitance array measurement, the capacitance variation in the chip can also be determined. The full address capacitance is measured and the sample data are decomposed into systematic and random variation components using a third-order polynomial fitting
for the chip.

Index Terms—Charge-based capacitance measurement, CBCM array, capacitance variation, polynomial fitting, transmission gate, shape of capacitors, driving capability, IR drop

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Ketersediaan

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Informasi Detail

Judul Seri

IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, VOL. 27, NO. 2, MAY 2014

No. Panggil

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Penerbit

: IEEE., 2014

Deskripsi Fisik

IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, VOL. 27, NO. 2, MAY 2014

Bahasa

English

ISBN/ISSN

0894-6507

Klasifikasi

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Tipe Isi

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Tipe Media

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Tipe Pembawa

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Edisi

VOL. 27, NO. 2, MAY 2014

Subjek

SEMIKONDUKTOR

Info Detail Spesifik

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Pernyataan Tanggungjawab

ETY

Versi lain/terkait

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