e-journal

Design of a Decentralized Controller for a Glass RTP System

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Abstract
The design of a decentralized controller has been studied as an integral part of the development of a commercial rapid thermal processing (RTP) system for manufacturing display glass. The glass RTP system uses bulb-type tungsten-halogen lamps for heating. A highly uniform temperature distribution with a maximum temperature difference of less than 6 ◦C between any two points is required during glass processing, regardless of the size of the glass. In designing a decentralized controller that satisfies this requirement, the problems of optimal sensor location, lamp grouping, optimization-based controller
tuning, and time-varying bias input signals were identified and solved. The performance of the controller was investigated experimentally and numerically.

Index Terms—Glass RTP, decentralized control, optimal sensor locations, input grouping, iterative learning control (ILC).

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Informasi Detail

Judul Seri

IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, VOL. 29, NO. 1, FEBRUARY 2016

No. Panggil

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Penerbit

: IEEE., 2016

Deskripsi Fisik

IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, VOL. 29, NO. 1, FEBRUARY 2016

Bahasa

English

ISBN/ISSN

0894-6507

Klasifikasi

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Tipe Isi

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Tipe Media

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Tipe Pembawa

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Edisi

VOL. 29, NO. 1, FEBRUARY 2016

Subjek

SEMIKONDUKTOR

Info Detail Spesifik

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Pernyataan Tanggungjawab

ETY

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