Gaya APA

Luo, J., Dornfeld, D, A. (2003). Effects of Abrasive Size Distribution in Chemical Mechanical Planarization: Modeling and Verification (VOL. 16, NO. 3, AUGUST 2003). : IEEE.

Gaya MLA

Luo, Jianfeng., Dornfeld, David, A.. "Effects of Abrasive Size Distribution in Chemical Mechanical Planarization: Modeling and Verification". VOL. 16, NO. 3, AUGUST 2003 : IEEE, 2003. e-journal.