e-journal

Improved Variable EWMA Controller for General ARIMA Processes

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Abstract
The exponentially weighted moving average (EWMA) controller is a popular run-to-run control scheme in semiconductor manufacturing because of its effectiveness and simplicity. In this paper, we propose an improved variable EWMA controller design method. The optimal discount factor of the EWMA controller is determined by minimizing the mean square error of process output at each run. The proposed method overcomes some potential problems of Tseng’s method and can be applied to general autoregressive integrated moving average processes. A numerical study is performed to investigate the performance and sensitivity of the proposed method. It is shown that the proposed method is more effective and robust than the conventional EWMA controller when the process parameters are estimated with uncertainty.

Index Terms—Run-to-run (RtR) control, exponentially weighted moving average (EWMA), variable discount factor, semiconductor manufacturing

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Informasi Detail

Judul Seri

IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, VOL. 28, NO. 2, MAY 2015

No. Panggil

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Penerbit

: IEEE., 2015

Deskripsi Fisik

IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, VOL. 28, NO. 2, MAY 2015

Bahasa

English

ISBN/ISSN

0894-6507

Klasifikasi

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Tipe Isi

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Tipe Media

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Tipe Pembawa

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Edisi

VOL. 28, NO. 2, MAY 2015

Subjek

SEMIKONDUKTOR

Info Detail Spesifik

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Pernyataan Tanggungjawab

ETY

Versi lain/terkait

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