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Makespan Analysis of Lot Switching Period in Cluster Tools

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Abstract
Cluster tools each of which consists of processing modules (PMs), a transport robot and loadlocks perform most wafer fabrication processes in semiconductor manufacturing. Recently, the lot size has been decreasing from 25 wafers to even 7-8 wafers due to the larger wafer size and circuit width reduction especially in large scale integration (LSI) manufacturing. Hence, the lot switching operation between two consecutive wafer lots occurs frequently. In this paper, we derive closed-form expressions of the makespan of the lot switching period in single-armed and dual-armed cluster tools with the
given robot task sequences for the first time. With this research, the completion time of a wafer lot can be easily estimated even though its preceding or next lot is processed together during the lot switching period. Hence, the makespan can be used for integrating operations of overhead hoist transports and cluster tools and assigning wafer lots to cluster tools while minimizing the lot switching period.

Index Terms—cluster tool, lot switching, transient period, makespan, completion time

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Informasi Detail

Judul Seri

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No. Panggil

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Penerbit

: IEEE., 2016

Deskripsi Fisik

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Bahasa

English

ISBN/ISSN

0894-6507

Klasifikasi

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Tipe Isi

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Tipe Media

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Tipe Pembawa

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Edisi

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Subjek

SEMIKONDUKTOR

Info Detail Spesifik

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Pernyataan Tanggungjawab

ETY

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