Gaya APA
Luo, J., Dornfeld, D, A. (2001).
Material Removal Mechanism in Chemical Mechanical Polishing: Theory and Modeling (VOL. 14, NO. 2, MAY 2001).
:
IEEE.
Gaya MLA
Luo, Jianfeng., Dornfeld, David, A..
"Material Removal Mechanism in Chemical Mechanical Polishing: Theory and Modeling".
VOL. 14, NO. 2, MAY 2001
:
IEEE,
2001.
e-journal.