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Modeling, Analysis, Simulation, Scheduling, and Control of Semiconductor Manufacturing Systems: A Petri Net Approach

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Abstract—This paper presents a Petri net approach to modeling, analysis, simulation, scheduling, and control of semiconductor manufacturing systems. These systems can be characterized as discrete event systems that exhibit sequential, concurrent, and conflicting relations among the events and operations. Their evolution is dynamic over time. The system complexity is tremendous owing to the complex semiconductor manufacturing processes and test procedures. A formal approach such as Petri nets
enables one to describe such complex discrete event systems precisely and thus allows one to perform both qualitative and quantitative analysis, scheduling and discrete-event control of them. This paper also serves as a tutorial paper. It briefly reviews applications of Petri nets in semiconductor manufacturing automation. It then introduces definitions and concepts of Petri nets. It proceeds with a discussion of basic Petri net modules in system modeling, a modeling method and a practical system’s
modeling example. Next, the paper presents their properties and their implications in manufacturing systems, as well as their analysis methods. Timed Petri nets are introduced for system simulation, performance evaluation, and scheduling purposes. An application-oriented case study is presented. Finally, the paper concludes with the active research areas in applying Petri nets to design of semiconductor manufacturing systems.

Index Terms—Automation, discrete event systems, performance evaluation, Petri nets, qualitative analysis, quantitative analysis, reduction, scheduling, semiconductor manufacturing, system modeling and simulation.

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Informasi Detail

Judul Seri

IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, VOL. 11, NO. 3, AUGUST 1998

No. Panggil

-

Penerbit

: IEEE., 1998

Deskripsi Fisik

IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, VOL. 11, NO. 3, AUGUST 1998

Bahasa

English

ISBN/ISSN

0894-6507

Klasifikasi

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Tipe Isi

-

Tipe Media

-

Tipe Pembawa

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Edisi

VOL. 11, NO. 3, AUGUST 1998

Subjek

SEMIKONDUKTOR

Info Detail Spesifik

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Pernyataan Tanggungjawab

ETY

Versi lain/terkait

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