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Novel Approaches to Optimizing Carrier Logistics in Semiconductor Manufacturing

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Abstract—This paper provides an overview of new approaches for assessing and addressing requirements for carrier logistics in semiconductor manufacturing and discusses solutions for optimizing the efficiency of capital equipment installed in the fab. An exploration of crucial influencing factors (both on the material handling as well as on the equipment side) will be followed by a discussion of different approaches to the challenges and an assessment of the impact of the proposed improvements. This paper also demonstrates how effective equipment throughput can be improved by the proposed methods.

Index Terms—Manufacturing automation, flexible manufacturing systems, materials handling equipment, predictive control, semiconductor device manufacture.

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Informasi Detail

Judul Seri

IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, VOL. 28, NO. 4, NOVEMBER 2015

No. Panggil

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Penerbit

: IEEE., 2015

Deskripsi Fisik

IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, VOL. 28, NO. 4, NOVEMBER 2015

Bahasa

English

ISBN/ISSN

0894-6507

Klasifikasi

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Tipe Isi

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Tipe Media

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Tipe Pembawa

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Edisi

VOL. 28, NO. 4, NOVEMBER 2015

Subjek

SEMIKONDUKTOR

Info Detail Spesifik

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Pernyataan Tanggungjawab

ETY

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