Gaya APA

Kakegawa, T., Futase, T. (2015). Pattern-Independent PMD Layer Planarization by Controlling its Volume Before CMP (VOL. 28, NO. 3, AUGUST 2015). : IEEE.

Gaya MLA

Kakegawa, Tomoyasu., Futase, Takuya. "Pattern-Independent PMD Layer Planarization by Controlling its Volume Before CMP". VOL. 28, NO. 3, AUGUST 2015 : IEEE, 2015. e-journal.