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Production Planning and WIP Assignment for Wafer Fabrication Tools With Availability Constraints

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Abstract—This paper deals with a short-term production plan of a single toolset during a shift at a semiconductor fabrication plant. We propose a cost-based optimization model that seeks to minimize the cost of the shift while meeting the following conditions: 1) the shift produces its required output, measured in work-in-process (WIP) levels; 2) preventive maintenance (PM) tasks are carried out in compliance with the manufacturer’s recommended PM policy; and 3) the equipment undergoes cleaning
operations, as recommended by the manufacturer, in a way that minimizes the production of blank wafers (a by-product of the cleaning process). A linear programming model is formulated and a practical procedure is provided to solve this production plan problem. Data from a real fab are used to demonstrate the optimality and applicability of the proposed approach. Results of various sensitivity analyzes further demonstrate how the model can be used to analyze the impact of changes in cost parameters, WIP levels and production rate parameters on the optimal solution.

Index Terms—Production planning, WIP management, Semiconductor manufacturing.

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Informasi Detail

Judul Seri

IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, VOL. 28, NO. 3, AUGUST 2015

No. Panggil

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Penerbit

: IEEE., 2015

Deskripsi Fisik

IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, VOL. 28, NO. 3, AUGUST 2015

Bahasa

English

ISBN/ISSN

0894-6507

Klasifikasi

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Tipe Isi

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Tipe Media

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Tipe Pembawa

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Edisi

VOL. 28, NO. 3, AUGUST 2015

Subjek

SEMIKONDUKTOR

Info Detail Spesifik

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Pernyataan Tanggungjawab

ETY

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