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Stability and Control Performance Analysis of Double EWMA Controller With Metrology Delay

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Abstract—This paper mainly focuses on establishing the stability conditions of the double exponentially weighted moving average (d-EWMA) controller with metrology delay when the process experiences a general disturbance and analyzing its control performance under some typical types of process disturbance.
The necessary and sufficient conditions for stability are established by Routh–Hurwitz criteria. It has been shown that if the process gain mismatch is greater than 4/3, metrology delay will make the feasible region of two weighting factors in the d-EWMA controller decrease, and the larger metrology delay is, the smaller the feasible region is. Moreover, given two weighting factors, it is found that metrology delay will weaken the robustness of the d-EWMA controller. The influence of metrology delay on the asymptotical control performance is evaluated based on asymptotical mean square error (AMSE). Optimal weighting factors and AMSE can be solved based on analytical expression of the AMSE, which is derived by using the Yule–Walker equations to avoid function summing limit operation. Through numerical
simulations, it demonstrates that metrology delay may increase the variability of the process output under certain conditions. Finally, the chemical mechanical polishing process in semiconductor
manufacturing is used to illustrate the validity of theoretical results.

Index Terms—Control performance, double EWMA controller, metrology delay, run to run control, semiconductor manufacturing.

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Informasi Detail

Judul Seri

IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, VOL. 29, NO. 1, FEBRUARY 2016

No. Panggil

-

Penerbit

: IEEE., 2016

Deskripsi Fisik

IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, VOL. 29, NO. 1, FEBRUARY 2016

Bahasa

English

ISBN/ISSN

0894-6507

Klasifikasi

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Tipe Isi

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Tipe Media

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Tipe Pembawa

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Edisi

VOL. 29, NO. 1, FEBRUARY 2016

Subjek

SEMIKONDUKTOR
METROLOGI

Info Detail Spesifik

-

Pernyataan Tanggungjawab

ETY

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