Statistical Comparison of Fault Detection Models for Semiconductor Manufacturing Processes

Pencarian berdasarkan :

SEMUA Pengarang Subjek ISBN/ISSN Pencarian Spesifik

Pencarian terakhir:

e-journal

Statistical Comparison of Fault Detection Models for Semiconductor Manufacturing Processes

Taehyung Lee - Nama Orang; Chang Ouk Kim - Nama Orang;

Abstract—A variety of statistical and data-mining techniques have been developed for the fault detection (FD) modeling of semiconductor manufacturing processes over the past three decades. However, few studies have analyzed which models are adequate for different types of fault data. In this paper, we define a FD model as an algorithm combining feature extraction, feature selection, and classification. We prepare six process data scenarios and collect data by simulating an etching tool. In total, 117 possible algorithm combinations are tested as FD models for the six datasets. With these test results, we conduct statistical analyses from two perspectives: 1) the algorithm perspective and
2) FD model perspective. From the algorithm perspective, we compare the performance of competing algorithms in the three model-building steps using multiple comparison methods and discuss
the advantages and disadvantages of individual algorithms. From the model perspective, we determine which algorithm combinations are recommended for FD models of the semiconductor process and explain why some combinations do not exhibit the expected performance. In both analyses, we interpret some results
using 3-D plots.

Index Terms—Fault detection (FD) models, data mining, statistical comparison, feature extraction, feature selection, classification.

Ketersediaan

Tidak ada salinan data

Informasi Detail

Judul Seri: IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, VOL. 28, NO. 1, FEBRUARY 2015
No. Panggil: -
Penerbit: : IEEE., 2015
Deskripsi Fisik: IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, VOL. 28, NO. 1, FEBRUARY 2015
Bahasa: English
ISBN/ISSN: 0894-6507
Klasifikasi: -
Tipe Isi: -
Tipe Media: -
Tipe Pembawa: -
Edisi: VOL. 28, NO. 1, FEBRUARY 2015
Subjek: SEMIKONDUKTOR
DATA MINING
Info Detail Spesifik: -
Pernyataan Tanggungjawab: ETY

Versi lain/terkait

Tidak tersedia versi lain

Lampiran Berkas

Statistical Comparison of Fault Detection Models for Semiconductor Manufacturing Processes

Komentar

Anda harus masuk sebelum memberikan komentar