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Tutorial on Applying the VM Technology for TFT-LCD Manufacturing

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Abstract—In the high-tech industries, on-line quality monitoring on each workpiece under processing is required to ensure process stability and improve yield rate. However, conducting workpiece-by-workpiece actual metrology is very expensive and time-consuming. In this case, a novel idea is to use “virtual
metrology” (VM) that conjectures workpiece quality based on process data collected from production equipment with a slight supplement of actual metrology data. The purpose of this tutorial paper is to select the thin film transistor-liquid crystal display (TFT-LCD) manufacturing processes as the illustrative examples for demonstrating the methodology of fab-wide implementation of the VM technology systematically. To begin with, a survey of VM-related literature is performed. Then, the features
of an effective and refined VM system are presented with the automatic VM (AVM) system developed by the authors as a case study, followed by introduction of the TFT-LCD production tools and manufacturing processes. After that, the generic deployment schemes of the VM technology for the TFT-LCD tools are proposed. Finally, illustrative examples with the AVM system as a case study are presented to show how the VM technology applies to TFT-LCD manufacturing.

Index Terms—Automatic virtual metrology (AVM), thin film transistor-liquid crystal display (TFT-LCD).

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Informasi Detail

Judul Seri

IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, VOL. 28, NO. 1, FEBRUARY 2015

No. Panggil

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Penerbit

: IEEE., 2015

Deskripsi Fisik

IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, VOL. 28, NO. 1, FEBRUARY 2015

Bahasa

English

ISBN/ISSN

0894-6507

Klasifikasi

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Tipe Isi

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Tipe Media

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Tipe Pembawa

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Edisi

VOL. 28, NO. 1, FEBRUARY 2015

Subjek

SEMIKONDUKTOR

Info Detail Spesifik

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Pernyataan Tanggungjawab

ETY

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