Gaya APA

[et.al.], D, S, L, M. (2011). Wafer Surface Charging Model for Single-Wafer Wet-Spin Processes (VOL. 24, NO. 4, NOVEMBER 2011). : IEEE.

Gaya MLA

[et.al.], David, S., L., Mui. "Wafer Surface Charging Model for Single-Wafer Wet-Spin Processes". VOL. 24, NO. 4, NOVEMBER 2011 : IEEE, 2011. e-journal.