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A Temperature-Stable Piezoelectric MEMS Oscillator Using a CMOS PLL Circuit for Temperature Sensing and Oven Control

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Abstract—In this paper, design, analysis, and implementation of a piezoelectric microelectromechanical systems (MEMS) oscillator on an ovenized microplatform is presented. An oxiderefill process is used to compensate the first-order temperature coefficient of frequency of MEMS resonators, as well as to realize thermal isolation structures. The technology enables fabrication of low-power ovenized device fusion platforms using standard silicon on insulator wafers. Utilizing the intrinsic requency temperature characteristic of two MEMS resonators, temperature sensing and closed-loop oven-control is realized by phaselocking two MEMS oscillators at an oven-set temperature. The design of the phase-lock control loop is studied using multidomain linear models. Control loop dynamics, noise properties, and
nonideal effects are analyzed. Low-power and low-noise phaselocked loop-based control circuitry is designed in 0.18-μm CMOS to interface with the MEMS resonators. Using the developed technology, an oven controlled MEMS oscillator exhibits an overall frequency drift of

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Informasi Detail

Judul Seri

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 24, NO. 6, DECEMBER 2015

No. Panggil

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Penerbit

: IEEE., 2015

Deskripsi Fisik

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Bahasa

English

ISBN/ISSN

1057-7157

Klasifikasi

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Tipe Isi

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Tipe Media

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Tipe Pembawa

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Edisi

VOL. 24, NO. 6, DECEMBER 2015

Subjek

MIKROELEKTROMEKANIKAL

Info Detail Spesifik

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Pernyataan Tanggungjawab

ETY

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