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A Tri-Beam Dog-Bone Resonant Sensor With High-Q in Liquid for Disposable Test-Strip Detection of Analyte Droplet

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Abstract—This paper presents a novel tri-beam structured dog-bone resonance-mode micro-sensor, with a frequency readout piezoresistive Wheatstone-bridge independently located at the central beam for the detection of liquid-phase bio/chemical analyte. Compared with the conventional dual-beam dog-bone
resonator, the tri-beam resonator has advantages in the elimination of signal feed-through and high-Q resonance in liquid. With sensing-material loaded on the sensing-plates of the resonator, the tri-beam extension-mode resonator is developed for liquid-phase sensing to adsorbed mass. Attributed to the high-Q factor in solution, the resonant sensor is suitable for the detection of traceamount
bio/chemical liquid-droplet sample. The experimental results show that the aqueous Hg2+ ion of 500 ppb concentration can be detected. [2015-0167]

Index Terms—Resonator sensor, length-extensional resonance mode, Q factor, signal feed-through, liquid-droplet detection, mercury ion in water.

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Informasi Detail

Judul Seri

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

No. Panggil

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Penerbit

: IEEE., 2016

Deskripsi Fisik

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Bahasa

English

ISBN/ISSN

1057-7157

Klasifikasi

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Tipe Isi

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Tipe Media

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Tipe Pembawa

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Edisi

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Subjek

MIKROELEKTROMEKANIKAL

Info Detail Spesifik

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Pernyataan Tanggungjawab

ETY

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