e-journal

Aluminum Nitride Cross-Sectional Lamé Mode Resonators

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Abstract—This paper demonstrates a new class of AlN-based piezoelectric resonators for operation in the microwave frequency range. These novel devices are identified as cross-sectional-Lamémode resonators (CLMRs) as they rely on the piezoelectric transduction of a Lamé mode, in the cross section of an AlN plate. Such a 2-D mechanical mode of vibration, characterized by motion along both the lateral and the thickness directions, is actuated and sensed piezoelectrically through the coherent combination
of the e31 and e33 piezoelectric coefficients of AlN. This special feature enables the implementation of CLMRs with high values of electromechanical coupling coefficient. In particular, we experimentally demonstrated k2t values in excess of 4.6% and 2.5% in CLMRs using, respectively, two or one metallic
interdigitated metallic electrodes, and operating around 1 and 2.8 GHz. Furthermore, despite the dependence of the crosssectional Lamé mode on both the thickness and the width of the AlN plate, lithographic tunability of the resonance frequency, by changing only the in-plane dimensions of the device, can be achieved without a substantial degradation of k2t . The capability of achieving high k2t
and multiple operating frequencies on the same chip, without additional fabrication costs (lithographic
tunability of the resonance frequency), makes this technology one of the best candidates for the implementation of multifrequency and low insertion loss filter banks for reconfigurable radiofrequency
front ends. [2015-0244]

Index Terms—Piezoelectric, resonators, filters, AlN, CMRs, FBARs, k2t

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Informasi Detail

Judul Seri

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

No. Panggil

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Penerbit

: IEEE., 2016

Deskripsi Fisik

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Bahasa

English

ISBN/ISSN

1057-7157

Klasifikasi

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Tipe Isi

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Tipe Media

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Tipe Pembawa

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Edisi

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Subjek

MIKROELEKTROMEKANIKAL

Info Detail Spesifik

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Pernyataan Tanggungjawab

ETY

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