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An Acceleration Sensing Method Based on the Mode Localization of Weakly Coupled Resonators

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Abstract—This paper reports an acceleration sensing method based on two weakly coupled resonators (WCRs) using the phenomenon of mode localization. When acceleration acts on the proof masses, differential electrostatic stiffness perturbations will be applied to the WCRs, leading to mode localization, and thus, mode shape changes. Therefore, acceleration can be sensed by measuring the amplitude ratio shift. The proposed mode localization with the differential perturbation method leads to a sensitivity enhancement of a factor of 2 than the common single perturbation method. The theoretical model of the sensitivity, bandwidth, and linearity of the accelerometer is established
and verified. The measured relative shift in amplitude ratio (∼312162 ppm/g) is 302 times higher than the shift in resonance frequency (∼1035 ppm/g) within the measurement range of ±1 g. The measured resolution based on the amplitude ratio is 0.619 mg and the nonlinearity is ∼3.5% in the open-loop measurement operation. [2015-0247]

Index Terms—Accelerometer, mode localization, weakly coupled resonators, inertial sensors

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Informasi Detail

Judul Seri

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

No. Panggil

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Penerbit

: IEEE., 2016

Deskripsi Fisik

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Bahasa

English

ISBN/ISSN

1057-7157

Klasifikasi

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Tipe Isi

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Tipe Media

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Tipe Pembawa

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Edisi

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Subjek

MIKROELEKTROMEKANIKAL

Info Detail Spesifik

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Pernyataan Tanggungjawab

ETY

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