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An Electrochemical Microbubble-Based MEMS Pressure Sensor

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Abstract—A novel pressure transducer concept is introduced in which external pressure variations induce changes in the volume of a trapped microbubble (μB) in an electrolyte solution. These volumetric changes are monitored by electrochemical impedance-based measurements and may be used for pressure
tracking applications. Microbubbles are nucleated on-demand by electrolysis within a confinement chamber with high precision (measured size RSD ∼1%). This pressure transducer concept was developed specifically for operation in liquid environments and features biocompatible construction, small footprint (

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Informasi Detail

Judul Seri

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 25, NO. 1, FEBRUARY 2016

No. Panggil

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Penerbit

: IEEE., 2016

Deskripsi Fisik

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Bahasa

English

ISBN/ISSN

1057-7157

Klasifikasi

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Tipe Isi

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Tipe Media

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Tipe Pembawa

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Edisi

VOL. 25, NO. 1, FEBRUARY 2016

Subjek

MIKROELEKTROMEKANIKAL

Info Detail Spesifik

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Pernyataan Tanggungjawab

ETY

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