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Bulk Mode Disk Resonator With Transverse Piezoelectric Actuation and Electrostatic Tuning

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Abstract—This paper presents a wine-glass bulk mode disk resonator based on a novel transverse piezoelectric actuation technique to achieve bulk mode resonance of the single crystalline silicon disk structure. The device is fabricated in a commercial microelectromechnical systems (MEMS) process,
and combines reasonable quality factor and superior motional resistance in a low-cost technology. External capacitive electrodes are used for electrostatic tuning of the resonance frequency,
relying on the electrostatic spring softening effect. The resonator was measured to have a resonance frequency of ∼15 MHz and a quality factor of ∼2000 in atmospheric pressure, increasing to ∼5000 in 100-mtorr vacuum. The temperature co-efficient for the frequency of the device was also measured to be about −40 ppm/°C. The resonator requires no dc voltage for operation, but its resonance frequency can be tuned by varying the applied dc voltage on the capacitive electrodes with a factor of 1 ppb/V2.

Index Terms—Microelectromechanical systems (MEMS), micromachined resonators, bulk mode resonators, piezoelectric actuation, aluminum nitride (AlN), bulk micromachining, PiezoMUMPs, timing.

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Informasi Detail

Judul Seri

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

No. Panggil

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Penerbit

: IEEE., 2016

Deskripsi Fisik

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Bahasa

English

ISBN/ISSN

1057-7157

Klasifikasi

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Tipe Isi

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Tipe Media

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Tipe Pembawa

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Edisi

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Subjek

MIKROELEKTROMEKANIKAL

Info Detail Spesifik

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Pernyataan Tanggungjawab

ETY

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