Characterization and Modeling of Nonlinearities in In-Plane Gap Closing Electrostatic Energy Harvester

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Characterization and Modeling of Nonlinearities in In-Plane Gap Closing Electrostatic Energy Harvester

Sukhdeep Kaur [et.al.] - Nama Orang;

Abstract—This paper investigates in detail a micro scale in-plane gap closing electrostatic energy harvester with strong nonlinearities in squeeze-film damping, electromechanical coupling, and impacts on end-stops. The device shows softening response on increasing the bias voltage and saturation behavior
on impact with end-stops at high enough acceleration amplitude. We demonstrate that a lumped model can adequately describe the measured nonlinear behavior for a range of operating conditions with nonlinear fluid damping force and impact force included in the model. While modeling capacitances, a finite-element method (FEM) is used to analyze fringing field effects on the capacitance variation for gap closing electrodes. The nominal capacitance is obtained from FEM analysis, for a range of under-cut values in the fabrication process treated as a free parameter in the model. The device modeled for linear and nonlinear squeeze-film damping force highlights the importance of nonlinear damping force to understand the device behavior over the range of operating conditions. With the compliant end-stops treated as spring-dampers and with proper choice of end-stop damping-coefficient, the model successfully captures the end-stop nonlinearities for a particular operating point and reproduces the dynamic pull-in phenomena at 8 V bias, and rms acceleration 0.6 g, as observed in the experiments. Thus, the model described in this paper reproduces the subtle nonlinear effects dominating the dynamics of an in-plane gap closing electrostatic energy harvester.

Index Terms—Electrostatic devices, energy harvester, nonlinear systems, vibrations

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Judul Seri: JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 24, NO. 6, DECEMBER 2015
No. Panggil: -
Penerbit: : IEEE., 2015
Deskripsi Fisik: -
Bahasa: English
ISBN/ISSN: 1057-7157
Klasifikasi: -
Tipe Isi: -
Tipe Media: -
Tipe Pembawa: -
Edisi: VOL. 24, NO. 6, DECEMBER 2015
Subjek: MIKROELEKTROMEKANIKAL
Info Detail Spesifik: -
Pernyataan Tanggungjawab: ETY

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haracterization and Modeling of Nonlinearities in In-Plane Gap Closing Electrostatic Energy Harvester

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