e-journal

Characterization of MEMS Resonator Nonlinearities Using the Ringdown Response

---

Abstract—We present a technique for estimation of the model parameters for a single-mode vibration of symmetric micromechanical resonators, including the coefficients of conservative and dissipative nonlinearities. The nonlinearities result in an amplitude-dependent frequency and a nonexponential decay, which are characterized from the ringdown response. An analysis of the amplitude of the ringdown response allows one to estimate the linear damping constant and the dissipative nonlinearity, and
the zero-crossing points in the ringdown measurement can be used for characterization of the linear natural frequency and the Duffing and quintic nonlinearities of the vibrational mode, which arise from a combination of mechanical and electrostatic effects.

Index Terms—MEMS characterization, ringdown, nonlinear damping, Duffing nonlinearity, quintic nonlinearity.

---

Ketersediaan

Tidak ada salinan data

Informasi Detail

Judul Seri

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

No. Panggil

-

Penerbit

: IEEE., 2016

Deskripsi Fisik

-

Bahasa

English

ISBN/ISSN

1057-7157

Klasifikasi

-

Tipe Isi

-

Tipe Media

-

Tipe Pembawa

-

Edisi

-

Subjek

MIKROELEKTROMEKANIKAL

Info Detail Spesifik

-

Pernyataan Tanggungjawab

ETY

Versi lain/terkait

Lampiran Berkas

Komentar

---

Anda harus masuk sebelum memberikan komentar