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Characterization of Oxide-Coated Polysilicon Disk Resonator Gyroscope Within a Wafer-Scale Encapsulation Process

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Abstract—In this paper, we present the fabrication and test results of an oxide-coated polysilicon disk resonator gyroscope in a wafer-scale encapsulation process. We demonstrate the effects of an oxide coating on the device structure and the key performance parameters of resonant-based sensors, such as
the temperature coefficient of frequency and quality factor (Q). Results from the as-fabricated device show that a thin oxide coating reduces the surface roughness of a fully encapsulated device by 10×, compared with a polysilicon device without the oxide coating. This increases the uniformity across the wafer, providing higher process yield. The open-loop rate measurement mode reveals an angle random walk of 0.18°/√ hr and a bias instability of 1.43°/hr.

Index Terms—Microelectromechanical systems (MEMS) gyroscope, wineglass mode, surface roughness, oxide coating, polysilicon.

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Informasi Detail

Judul Seri

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 24, NO. 6, DECEMBER 2015

No. Panggil

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Penerbit

: IEEE., 2015

Deskripsi Fisik

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Bahasa

English

ISBN/ISSN

1057-7157

Klasifikasi

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Tipe Isi

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Tipe Media

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Tipe Pembawa

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Edisi

VOL. 24, NO. 6, DECEMBER 2015

Subjek

MIKROELEKTROMEKANIKAL

Info Detail Spesifik

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Pernyataan Tanggungjawab

ETY

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