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Design and Analysis of Scanning Probe Microscopy Cantilevers With Microthermal Actuation

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Abstract—The scanning probe microscope has revolutionized our ability to image and characterize the physical and chemical properties of material with atomic resolution. It has evolved as a versatile instrument for nanofabrication including atomic deposition, nanolithography, nanomachining, atomic
manipulation, and assembly. However, in order to enable practical nanofabrication with scanning probe tips, it is critical to address the issues of throughput, tip wear effects, chemical cross contamination, and scalability. In this paper, we address these issues by designing, optimizing, fabricating, and testing active electromechanical cantilever probes with an integrated microgripper for automated modular tip exchange. The cantilevers are designed and optimized to be compatible with existing atomic force microscope systems. Mechanical performance and optimization are carried out by the development of an analytical electrothermomechanical model and multiphysics finite-element
analysis. The silicon cantilevers are formed by microfabrication processes and characterized by scanning electron microscopy, laser vibrometry, and in situ optical microscopy current–voltage
studies. The cantilever grippers are shown to actuate with a maximum displacement of 3 μm for each arm at an applied voltage of 4 V 6-μm total displacement for grasping modular tool-tips. Gripping is demonstrated by grasping and releasing of a cylindrical microtool (wire)

Index Terms—Atomic force microscopy, scanning probe microscopy, microgripper.

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Informasi Detail

Judul Seri

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 24, NO. 6, DECEMBER 2015

No. Panggil

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Penerbit

: IEEE., 2015

Deskripsi Fisik

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Bahasa

English

ISBN/ISSN

1057-7157

Klasifikasi

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Tipe Isi

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Tipe Media

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Tipe Pembawa

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Edisi

VOL. 24, NO. 6, DECEMBER 2015

Subjek

MIKROELEKTROMEKANIKAL

Info Detail Spesifik

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Pernyataan Tanggungjawab

ETY

Versi lain/terkait

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