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Dynamically Balanced Folded-Beam Suspensions for Resonators

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Abstract—The standard folded-beam suspension is often used in electrostatic comb-drive resonators with the intention of achieving a system with a linear response. However, we show that the harmonic response of the standard folded-beam suspension is not linear at the fundamental resonance frequency of the system. Specifically, we show that at the fundamental resonance
frequency, the stiffness of the suspension increases monotonically with increasing motion amplitude. We show that even though the suspension is intended to respond as a linear spring, it is actually
designed to do so only in static loading. We present a solution to the problem in the form of a new dynamically balanced foldedbeam suspension. This suspension is designed such that at the fundamental frequency of the system, its response is linear, and its stiffness is unaffected by motion. The methodology for designing this suspension is fully detailed. We experimentally demonstrate
the viability of the new design.

Index Terms—Folded-beam suspensions, electrostatic resonators, comb-drives.

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Informasi Detail

Judul Seri

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 24, NO. 6, DECEMBER 2015

No. Panggil

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Penerbit

: IEEE., 2015

Deskripsi Fisik

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Bahasa

English

ISBN/ISSN

1057-7157

Klasifikasi

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Tipe Isi

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Tipe Media

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Tipe Pembawa

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Edisi

VOL. 24, NO. 6, DECEMBER 2015

Subjek

MIKROELEKTROMEKANIKAL

Info Detail Spesifik

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Pernyataan Tanggungjawab

ETY

Versi lain/terkait

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