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Frictional Characteristics of Sub-100-μm Borosilicate Glass Balls for Actuator Applications

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Abstract—The frictional characteristics of ∼62-μm diameter borosilicate glass balls used as rolling elements for a miniature electromagnetic linear actuator were assessed. The glass balls were placed between two silicon plates of the actuator with linear bearing tracks fabricated in the shape of V-grooves on the silicon surface. Rolling friction experiments were conducted using the electromagnetic linear actuator as well as a tribotester. It was shown that the glass balls were effective in generating a low friction coefficient of ∼0.01 over 11 million cycles under a load of 6.6 mN. For the durability test using the tribotester, a relatively high load of 245 mN was applied. In this case,
evidence of silicon surface damage could be found. The feasibility of using Au as a solid lubricating film on the silicon surface was investigated. It was found that the friction coefficient and surface damage depended on the thickness of the film, which was varied from 7∼20 nm. It was postulated that the low shear strength of Au aided in reducing the friction coefficient from ∼0.017 to ∼0.013. With improved adhesion of the Au coating on silicon, the use of sub-100-μm borosilicate glass balls as rolling elements for miniature actuators seems promising.

Index Terms—Actuators, bearings (mechanical), electromagnetic forces, friction, reliability testing, wear

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Informasi Detail

Judul Seri

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 24, NO. 6, DECEMBER 2015

No. Panggil

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Penerbit

: IEEE., 2015

Deskripsi Fisik

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Bahasa

English

ISBN/ISSN

1057-7157

Klasifikasi

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Tipe Isi

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Tipe Media

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Tipe Pembawa

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Edisi

VOL. 24, NO. 6, DECEMBER 2015

Subjek

MIKROELEKTROMEKANIKAL

Info Detail Spesifik

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Pernyataan Tanggungjawab

ETY

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