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Ge/ZnS-Based Micromachined Fabry–Perot Filters for Optical MEMS in the Longwave Infrared

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Abstract—This paper reports on the successful demonstration of Ge/ZnS-based Fabry–Perot filters operating in the longwave infrared (LWIR). The suitability of thermally deposited Ge and ZnS as thin-film mirror materials for micromachined LWIR Fabry–Perot filters has been fully investigated, and it is shown that a film growth temperature higher than 150 °C is key to depositing durable ZnS films. The optical constants of Ge and ZnS films in the LWIR band reveal that the material pair possesses high refractive index contrast and excellent LWIR transparency. Fixed-cavity LWIR Fabry–Perot filters with a
150-μm circular single-layer Ge top mirror and a four-layer Ge/ZnS/Ge/ZnS bottom mirror were fabricated. Curvature in the suspended top mirror was corrected using a thin SiNx stresscompensation
layer. After curvature correction, a mirror flatness of 550 nm was achieved, and the filter demonstrated a 60% peak transmission with a full-width at half-maximum of 700 nm as well as a out-of-band rejection of 24:1.

Index Terms—Fabry-Perot, longwave infrared, LWIR, micromachining, multispectral, optical filter, thermal imaging

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Informasi Detail

Judul Seri

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 24, NO. 6, DECEMBER 2015

No. Panggil

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Penerbit

: IEEE., 2015

Deskripsi Fisik

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Bahasa

English

ISBN/ISSN

1057-7157

Klasifikasi

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Tipe Isi

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Tipe Media

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Tipe Pembawa

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Edisi

VOL. 24, NO. 6, DECEMBER 2015

Subjek

MIKROELEKTROMEKANIKAL

Info Detail Spesifik

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Pernyataan Tanggungjawab

ETY

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