e-journal

Highly Sensitive Tactile Sensing Array Realized Using a Novel Fabrication Process With Membrane Filters

---

Abstract—This paper presents a highly sensitive tactile sensing array. Sensing elements of the array comprise multiwall carbon nanotubes and polydimethylsiloxane polymer. A novel lithography process is proposed for fabricating an SU-8 mold for shaping the sensing cells in the array. In addition, a nylon
membrane filter is proposed to serve as a mold for numerous microdome patterns, which were transferred onto a conductive polymer film. The proposed device features advantages, such as ultra-high sensitivity, flexibility, and a simple fabrication process. Tunneling piezoresistive effects of interlocked microdome structures fabricated using membrane filters with different pore sizes were observed. The measured maximum sensitivity and typical response time were approximately −7.73 kPa−1
and 4 ms, respectively. In addition, the measured results show that the patterned polymer composite arranged in a row–column array can effectively eliminate the crosstalk effect. Moreover, measurements for various tactile sensing applications were demonstrated.

Index Terms—Carbon nanotubes, conductive polymer, membrane filter, polydimethylsiloxane (PDMS), tactile sensor

---

Ketersediaan

Tidak ada salinan data

Informasi Detail

Judul Seri

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 24, NO. 6, DECEMBER 2015

No. Panggil

-

Penerbit

: IEEE., 2015

Deskripsi Fisik

-

Bahasa

English

ISBN/ISSN

1057-7157

Klasifikasi

-

Tipe Isi

-

Tipe Media

-

Tipe Pembawa

-

Edisi

VOL. 24, NO. 6, DECEMBER 2015

Subjek

MIKROELEKTROMEKANIKAL

Info Detail Spesifik

-

Pernyataan Tanggungjawab

ETY

Versi lain/terkait

Lampiran Berkas

Komentar

---

Anda harus masuk sebelum memberikan komentar