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In-Plane and Out-of-Plane MEMS Gyroscopes Based on Piezoresistive NEMS Detection

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Abstract—This paper presents a new design and a complete characterization of amplitude-modulation gyroscopes based on piezoresistive nanogauges. The working principle and optimization criteria of in-plane and out-of-plane devices relying on double frame decoupling and levered sense mode are
discussed in light of sensitivity and resolution theoretical predictions. The architecture of driving and sensing electronics is also presented. The reduced thermo-mechanical damping with respect to capacitive configurations, and the inherently high output signal leads to white noise performance in the mdps/√Hz range within an area smaller than 0.35 mm2, at pressures in the millibar range. Sub-5-ppm linearity errors within 1000 dps are also demonstrated.

Index Terms—MEMS gyroscopes, NEMS gauges, inertial sensors, piezoresistive sensing, motion amplitude control.

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Informasi Detail

Judul Seri

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 24, NO. 6, DECEMBER 2015

No. Panggil

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Penerbit

: IEEE., 2015

Deskripsi Fisik

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Bahasa

English

ISBN/ISSN

1057-7157

Klasifikasi

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Tipe Isi

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Tipe Media

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Tipe Pembawa

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Edisi

VOL. 24, NO. 6, DECEMBER 2015

Subjek

MIKROELEKTROMEKANIKAL

Info Detail Spesifik

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Pernyataan Tanggungjawab

ETY

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