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Investigation Into the Quality Factor of Piezoelectric-on-Silica Micromachined Resonators

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Abstract—In this paper, we investigate loss mechanisms in piezoelectric-on-silica bulk acoustic wave resonators, including those resulting from thermoelastic damping (TED), surface roughness, and supporting tethers. Alternate resonator designs, piezoelectric materials, and fabrication processes are
demonstrated to empirically test these loss mechanisms. Quality factors (Qs) in the order of ∼16 000 at a center frequency of 5 MHz have been consistently measured for aluminum nitride (AlN)-on-silica coupled-ring resonators. It is shown that neither TED nor surface losses are the dominant sources of loss for AlN-on-silica resonators in the megahertz regime. Instead, it is suggested that charge redistribution loss resulting from nonuniform strain across the piezoelectric layer is the dominant
loss mechanism, with a charge redistribution Q of ∼38 000 at 5 MHz for AlN-on-silica devices. When all loss mechanisms are considered, the total Q is estimated to be 25 000, a value comparable to the measured results of the piezoelectric-on-silica resonators of this paper.

Index Terms—MEMS, resonator, aluminum nitride, thermoelastic damping, surface loss, charge redistribution, fused silica.

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Informasi Detail

Judul Seri

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 24, NO. 6, DECEMBER 2015

No. Panggil

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Penerbit

: IEEE., 2015

Deskripsi Fisik

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Bahasa

English

ISBN/ISSN

1057-7157

Klasifikasi

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Tipe Isi

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Tipe Media

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Tipe Pembawa

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Edisi

VOL. 24, NO. 6, DECEMBER 2015

Subjek

MIKROELEKTROMEKANIKAL

Info Detail Spesifik

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Pernyataan Tanggungjawab

ETY

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