Gaya APA

[et.al.], A, M. (2015). Investigation of E-Beam Evaporated Silicon Film Properties for MEMS Applications (VOL. 24, NO. 6, DECEMBER 2015). : IEEE.

Gaya MLA

[et.al.], Aron, Michael. "Investigation of E-Beam Evaporated Silicon Film Properties for MEMS Applications". VOL. 24, NO. 6, DECEMBER 2015 : IEEE, 2015. e-journal.