e-journal

EM Estimation of Nanostructure Interactions With Incomplete Feature Measurement and Its Tailored Space Filling Designs

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Automatic assessment of nanostructure quality is essential for scale-up nanomanufacturing. In our previous work, we have developed a method to quantify nanostructure growth quality and detect structural defects through interaction analysis. However, because the method builds on complete feature measurement,
its direct application to nanomanufacturing systems is severely constrained by nanostructure metrology. For current inspection techniques such as scanning electron microscope (SEM), the major difficulties of measuring nanostructures lie in two aspects: (i) taking and calibrating images for seamless coverage
and (ii) extracting and matching feature information from the images. In this paper, we develop a tailored sampling strategy to relax the metrology constraint. It not only explores the growth region with greatly reduced metrology efforts but maintains desired sampling resolution. In addition, we customize Expectation-Maximization algorithm to optimize interaction estimation with corresponding “incomplete” measurement. Our developed approach enables nanostructure characterization within manufacturing relevant time spans and thus provides a supporting tool for nanomanufacturing.
Note to Practitioners—Automatic assessment of nanostructure quality is essential for scale-up nanomanufacturing, but current characterization of nanostructures based on SEM or transmission
electron microscopy (TEM) is labor and computation intensive. This paper develops methods to quantify nanostructure local variability and detect defects with minimum metrology efforts. Index Terms—Defect detection, expectation-maximization (EM), incomplete feature measurement, nanomanufacturing,
nanostructure interactions, nanostructure metrology, space filling design.

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Informasi Detail

Judul Seri

IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING

No. Panggil

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Penerbit

: ., 2013

Deskripsi Fisik

IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, VOL. 10, NO. 3, JULY 2013

Bahasa

English

ISBN/ISSN

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Klasifikasi

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Tipe Isi

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Tipe Media

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Tipe Pembawa

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Edisi

VOL. 10, NO. 3

Subjek

TEKNIK

Info Detail Spesifik

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Pernyataan Tanggungjawab

yuli/agus

Versi lain/terkait

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