e-journal
Automated Pick-Place of Silicon Nanowires
Pick-place of single nanowires inside scanning electron microscopes (SEM) is useful for prototyping functional devices and characterizing nanowires’s properties. Nanowire pickplace has been typically performed via teleoperation,which is timeconsuming and highly skill-dependent. This paper presents an automated approach to the pick-place of single nanowires. Through SEM visual detection and vision-based motion control, the system automatically transferred individual silicon nanowires from their growth substrate to a microelectromechanical systems (MEMS)device that characterized the nanowires’s electromechanical properties. The performance of the nanorobotic pick-up and placement
procedures was experimentally quantified. Note to Practitioners—Manipulation of single nanowires or
nanotubes is important for their characterization and nanodevice construction. Joystick-based teleoperation of nanomanipulators installed inside a SEM is a commonly used approach for the
pick-place of individual nanowires/nanotubes. Nevertheless, the manual process is tedious and ime-consuming, even for skilled operators. To address this issue, this paper presents a set of SEM-vision-based techniques to automate the nanowire pick-place process. The techniques can facilitate nanowire/nanotube property characterization and nanodevice prototyping. Index Terms—Automated nanomanipulation, nanorobotic pickplace, nanowires, scanning electron microscopes (SEM).
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