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Material Characterization and Transfer of Large-Area Ultra-Thin Polydimethylsiloxane Membranes

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Abstract—Fabrication of ultra-thin (1–20-μm thickness) polydimethylsiloxane (PDMS) films is enabled with a hexane dilution process and an underlying gelatin release layer. The release and transfer of these films over large areas (>5 cm) allows measurement of the thickness-dependent and process-dependent
mechanical properties of ultra-thin PDMS membranes, reported for the first time. The effective Young’s modulus of 1-μm-thick PDMS, measured by bulge testing, is approximately ten times larger than that of 0.5-mm-thick material, following a continuous power-law relationship over the entire thickness range. Mesh-patterned metal electrodes of 2-μm minimum feature size are embedded in selected membranes. Metal evaporation and subsequent reactive ion etch patterning on PDMS increases its Young’s modulus due to the increase in cross-link formation and hardening of the surface. The results are meaningful in design and fabrication of soft electronics, microsensors, microvalves, and micropumps.

Index Terms—MEMS, PDMS, thin film polymer, microfabrication, material charaterization

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Informasi Detail

Judul Seri

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 24, NO. 6, DECEMBER 2015

No. Panggil

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Penerbit

: IEEE., 2015

Deskripsi Fisik

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Bahasa

English

ISBN/ISSN

1057-7157

Klasifikasi

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Tipe Isi

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Tipe Media

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Tipe Pembawa

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Edisi

VOL. 24, NO. 6, DECEMBER 2015

Subjek

MIKROELEKTROMEKANIKAL

Info Detail Spesifik

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Pernyataan Tanggungjawab

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